SuperMagSense
HOME
RESEARCH
1. Concept
2. GMR Sensor
3. HTS Concentrator
4. Hybrid sensor
PUBLICATIONS
TEAM
HOME
RESEARCH
1. Concept
2. GMR Sensor
3. HTS Concentrator
4. Hybrid sensor
PUBLICATIONS
TEAM
4. HYBRID SENSOR FABRICATION
The UV lithography masks for the hybrid sensor fabrication have been designed;
The mask includes two HTS concentrator geometries and several alternatives for the GMR sensor, based on the yoke and meander geometries
An alignment system for the GMR sensor and the HTS concentrator has been developed entirely in-house;
The system allows the fabrication of the hybrid sensor fabrication using the flip-chip technique;
The GMR sensor is aligned by means of micrometric screws (THORLABS) with respect to the fixed HTS Concentrator;
The GMR sensor may be moved along the X,Y and Z axes and also rotated;
Both samples are held in place by vacuum;
The alignment is checked by a digital microscope equipped with a 5 MP camera and zooming options fro 15x - 365x.
For sample (GMR sensor, HTS concentrator) dicing a dicing system has been constructed, entirely in-house,
Precision translation stages (THORLABS) are used for an accurate substrate dicing.